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Scaling issues and design of MEMS /

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Bibliographic Details
Main Author:	Baglio, S. (Salvatore)
Other Authors:	Castorina, Salvatore, Savalli, Nicolò
Format:	Book
Language:	English
Published:	Chichester, England ; Hoboken, NJ : John Wiley & Sons, [2007]
Subjects:	Microelectromechanical systems > Design and construction.
Online Access:	Publisher description Table of contents only

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