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Scaling issues and design of MEMS /

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Bibliographic Details
Main Author: Baglio, S. (Salvatore)
Other Authors: Castorina, Salvatore, Savalli, Nicolò
Format: Book
Language:English
Published: Chichester, England ; Hoboken, NJ : John Wiley & Sons, [2007]
Subjects:
Microelectromechanical systems > Design and construction.
Online Access:Publisher description
Table of contents only
Description
Physical Description:xiii, 229 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9780470016992 (pbk.)
047001699X (pbk.)