Two- and three-dimensional methods for inspection and metrology V : 11-12 September 2007, Boston, Massachusetts, USA /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Huang, Peisen S.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2007]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 6762.
Subjects:
Description
Physical Description:1 volume (various pagings) : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9780819469229
081946922X