Cover Image

Focused ion beam systems : basics and applications /

Bibliographic Details
Other Authors: Yao, Nan
Format: Book
Language:English
Published: Cambridge : Cambridge University Press, 2007.
Subjects:
Focused ion beams.
Focused ion beams > Industrial applications.
Description
Physical Description:xi, 395 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9780521831994 (hbk.)
0521831997 (hbk.)