Fabrication engineering at the micro and nanoscale /
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York :
Oxford University Press,
2008.
|
| Edition: | 3rd ed. |
| Series: | Oxford series in electrical and computer engineering.
|
| Subjects: | |
| Online Access: | Table of contents only |
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