Fabrication engineering at the micro and nanoscale /
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
Oxford University Press,
2008.
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| Edition: | 3rd ed. |
| Series: | Oxford series in electrical and computer engineering.
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| Subjects: | |
| Online Access: | Table of contents only |
| Item Description: | Revised edition of: The science and engineering of microelectronic fabrication. 2nd. edition. |
|---|---|
| Physical Description: | xiv, 647 pages : illustrations ; 24 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780195320176 (pbk. : alk. paper) 0195320174 (pbk. : alk. paper) |