Radio frequency power in plasmas : 17th Topical Conference on Radio Frequency Power in Plasmas : Clearwater, Florida, 7-9 May 2007 /

Bibliographic Details
Corporate Authors: Topical Conference on Radio Frequency Power in Plasmas Clearwater, Florida, American Physical Society
Other Authors: Ryan, Philip M., Rasmussen, David A.
Format: Conference Proceeding Book
Language:English
Published: Melville, N.Y. : American Institute of Physics, 2007.
Series:AIP conference proceedings. 933.
Subjects:
Description
Physical Description:xv, 527 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0735404445
9780735404441
ISSN:0094-243X ;