Radio frequency power in plasmas : 17th Topical Conference on Radio Frequency Power in Plasmas : Clearwater, Florida, 7-9 May 2007 /
| Corporate Authors: | , |
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| Other Authors: | , |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Melville, N.Y. :
American Institute of Physics,
2007.
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| Series: | AIP conference proceedings.
933. |
| Subjects: |
| Physical Description: | xv, 527 pages : illustrations ; 25 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0735404445 9780735404441 |
| ISSN: | 0094-243X ; |