Microelectronic applications of chemical mechanical planarization /

Bibliographic Details
Other Authors:	Li, Yuzhuo
Format:	Book
Language:	English
Published:	Hoboken, N.J. : Wiley-Interscience, [2008]
Subjects:	Integrated circuits > Design and construction. Chemical mechanical planarization. Microelectronics > Materials.
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Published 2008

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