Microelectronic applications of chemical mechanical planarization /
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Hoboken, N.J. :
Wiley-Interscience,
[2008]
|
| Subjects: | |
| Online Access: | Table of contents only Publisher description Contributor biographical information |
MARC
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| 082 | 0 | 0 | |a 621.3815 |2 22 |
| 245 | 0 | 0 | |a Microelectronic applications of chemical mechanical planarization / |c edited by Yuzhuo Li. |
| 264 | 1 | |a Hoboken, N.J. : |b Wiley-Interscience, |c [2008] | |
| 264 | 4 | |c ©2008 | |
| 300 | |a xxv, 734 pages : |b illustrations ; |c 25 cm. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a unmediated |b n |2 rdamedia | ||
| 338 | |a volume |b nc |2 rdacarrier | ||
| 504 | |a Includes bibliographical references and index. | ||
| 650 | 0 | |a Integrated circuits |x Design and construction. | |
| 650 | 0 | |a Chemical mechanical planarization. | |
| 650 | 0 | |a Microelectronics |x Materials. | |
| 700 | 1 | |a Li, Yuzhuo. | |
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