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Microelectronic applications of chemical mechanical planarization /

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Bibliographic Details
Other Authors: Li, Yuzhuo
Format: Book
Language:English
Published: Hoboken, N.J. : Wiley-Interscience, [2008]
Subjects:
Integrated circuits > Design and construction.
Chemical mechanical planarization.
Microelectronics > Materials.
Online Access:Table of contents only
Publisher description
Contributor biographical information
Description
Physical Description:xxv, 734 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9780471719199
0471719196