APA (7th ed.) Citation

Li, Y. (2008). Microelectronic applications of chemical mechanical planarization. Wiley-Interscience.

Chicago Style (17th ed.) Citation

Li, Yuzhuo. Microelectronic Applications of Chemical Mechanical Planarization. Hoboken, N.J.: Wiley-Interscience, 2008.

MLA (9th ed.) Citation

Li, Yuzhuo. Microelectronic Applications of Chemical Mechanical Planarization. Wiley-Interscience, 2008.

Warning: These citations may not always be 100% accurate.