rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Plasma-aided nanofabrication
    sub title: from plasma sources to nanoassembly
  name:
    name part: Ostrikov, K. (Kostya)
    role:
      role term: creator
  name:
    name part: Xu, Shuyan.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: gw
    date issued: 2007
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xiii, 300 pages : illustrations (some color) ; 25 cm.
  note: Kostya (Ken) Ostrikov and Shuyan Xu.
  note: Includes bibliographical references and index.
  subject:
    topic: Nanostructured materials
  subject:
    topic: Plasma engineering
  subject:
    topic: Low temperature plasmas
  subject:
    topic: Manufacturing processes
  classification: 620.5
  identifier: 9783527406333
  identifier: 3527406336
  record info:
    record content source: UKM
    record creation date: 070726
    record change date: 20151108044433.0
    record identifier: in00002336089