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Handbook of semiconductor manufacturing technology /

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Bibliographic Details
Other Authors: Doering, Robert, 1946-, Nishi, Yoshio, 1940-
Format: Book
Language:English
Published: Boca Raton, Fla. : CRC Press, [2008]
Edition:2nd ed.
Subjects:
Semiconductors > Design and construction > Handbooks, manuals, etc.
Semiconductor industry > Handbooks, manuals, etc.
Online Access:Table of contents only
Description
Physical Description:1 volume (various pagings) : illustrations ; 27 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9781574446753
1574446754