rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: MOEMS and miniaturized systems VI
    sub title: 24-25 January 2007, San Jose, California, USA
  title info:
    title: MOEMS and miniaturized systems six
  title info:
    title: MOEMS and miniaturized systems 6
  name:
    name part: Dickensheets, David L.
  name:
    name part: Gogoi, Bishnu P.
  name:
    name part: Schenk, Harald.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 2007
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: 1 volume (various pagings) : illustrations ; 28 cm.
  note: David L. Dickensheets, Bishnu P. Gogoi, Harald Schenk, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectromechanical systems
    genre: Congresses
  subject:
    topic: Miniature electronic equipment
    genre: Congresses
  subject:
    topic: Micromechanics
    genre: Congresses
  subject:
    topic: Optical scanners
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 6466
  identifier: 9780819465795
  identifier: 0819465798
  record info:
    record content source: CUS
    record creation date: 070227
    record change date: 20151104184839.0
    record identifier: in00002229293