rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Contamination and ESD control in high-technology manufacturing
  name:
    name part: Welker, R. W.
    role:
      role term: creator
  name:
    name part: Nagarajan, R. (Ramamurthy)
  name:
    name part: Newberg, Carl E.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: nju
    date issued: 2006
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xvi, 498 pages : illustrations ; 26 cm.
  note: Roger W. Welker, R. Nagarajan, Carl E. Newberg.
  note: Includes bibliographical references and index.
  subject:
    topic: Electronic apparatus and appliances
    topic: Protection
  subject:
    topic: Electric discharges
  subject:
    topic: Electrostatics
  subject:
    topic: Contamination (Technology)
  subject:
    topic: Clean rooms
  classification: TK7870 .W36 2006
  classification: 670.42
  identifier: 0471414522
  identifier: 2005058119
  identifier: http://www.loc.gov/catdir/enhancements/fy0626/2005058119-d.html
  related item:
    location:
      url: http://www.loc.gov/catdir/enhancements/fy0626/2005058119-d.html
  record info:
    record content source: DLC
    record creation date: 051129
    record change date: 20151104095559.0
    record identifier: in00002202320