Contamination and ESD control in high-technology manufacturing /
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Hoboken, N.J. :
John Wiley & Sons : IEEE Press,
[2006]
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| Subjects: | |
| Online Access: | Publisher description |
| Physical Description: | xvi, 498 pages : illustrations ; 26 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0471414522 |