Contamination and ESD control in high-technology manufacturing /

Bibliographic Details
Main Author: Welker, R. W.
Other Authors: Nagarajan, R. (Ramamurthy), Newberg, Carl E.
Format: Book
Language:English
Published: Hoboken, N.J. : John Wiley & Sons : IEEE Press, [2006]
Subjects:
Online Access:Publisher description
Description
Physical Description:xvi, 498 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0471414522