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Mechanics of microelectronics /

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Bibliographic Details
Main Author: Zhang, G. Q.
Other Authors: Driel, W. D. van, Fan, X. J.
Format: Book
Language:English
Published: Dordrecht : Springer, 2006.
Series:Solid mechanics and its applications ; v. 141.
Subjects:
Microelectronics.
Mechanical engineering.
Online Access:Table of contents only
Publisher description
Description
Item Description:State of the art report.
Physical Description:xiii, 563 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references.
ISBN:140204934X (hbk.)
9781402049347 (hbk.)
1402049358 (e-book)
9781402049354 (e-book)