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Influence of the deposition conditions on radiofrequency magnetron sputtered MoS2 films /

Bibliographic Details
Main Author:	Steinmann, Pierre A.
Corporate Authors:	Lewis Research Center, United States. National Aeronautics and Space Administration. Scientific and Technical Information Division
Other Authors:	Spalvins, Talivaldis
Format:	Government Document Microform Book
Language:	English
Published:	[Washington, D.C.] : National Aeronautics and Space Administration, Office of Management, Scientific and Technical Information Division ; 1990.
Series:	NASA technical paper ; 2994.
Subjects:	Coatings. Lubrication and lubricants. Molybdenum compounds. Sputtering (Physics) Deposition. Lubricants. Magnetron sputtering. Morphology. Radio frequencies. Stoichiometry. Thin films.
Online Access:	https://purl.fdlp.gov/GPO/LPS68087

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