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Influence of the deposition conditions on radiofrequency magnetron sputtered MoS2 films /

Bibliographic Details
Main Author: Steinmann, Pierre A.
Corporate Authors: Lewis Research Center, United States. National Aeronautics and Space Administration. Scientific and Technical Information Division
Other Authors: Spalvins, Talivaldis
Format: Government Document Microform Book
Language:English
Published: [Washington, D.C.] : National Aeronautics and Space Administration, Office of Management, Scientific and Technical Information Division ; 1990.
Series:NASA technical paper ; 2994.
Subjects:
Coatings.
Lubrication and lubricants.
Molybdenum compounds.
Sputtering (Physics)
Deposition.
Lubricants.
Magnetron sputtering.
Morphology.
Radio frequencies.
Stoichiometry.
Thin films.
Online Access:https://purl.fdlp.gov/GPO/LPS68087
Description
Item Description:"April 1990."
Prepared at Lewis Research Center.
Shipping list number: 1990-0871-M.
Distributed to depository libraries in microfiche.
Microform.
Physical Description:7 pages : illustrations ; 28 cm.
Also available via Internet from the NTRS web site. Address as of 3/23/06: http://ntrs.nasa.gov/archive/nasa/casi.ntrs.nasa.gov/19900011894%5F1990011894.pdf; current access is available via PURL.
Bibliography:Bibliography: page 3.