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Design and process integration for microelectronic manufacturing IV : 23-24 February 2006, San Jose, California, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, International SEMATECH
Other Authors: Wong, Alfred Kwok-Kit, Singh, Vivek K.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2006]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 6156.
Subjects:
Integrated circuits > Design and construction > Congresses.
Integrated circuits > Defects > Analysis > Congresses.
Semiconductors > Design and construction > Congresses.
Semiconductor wafers > Defects > Analysis > Congresses.
Microelectronics industry > Quality control > Congresses.
Quality control > Congresses.
Description
Physical Description:1 volume (various pagings) : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819461997