APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, International SEMATECH, Wong, A. K., & Singh, V. K. (2006). Design and process integration for microelectronic manufacturing IV: 23-24 February 2006, San Jose, California, USA. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, International SEMATECH, Alfred Kwok-Kit Wong, and Vivek K. Singh. Design and Process Integration for Microelectronic Manufacturing IV: 23-24 February 2006, San Jose, California, USA. Bellingham, Washington: SPIE, 2006.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Design and Process Integration for Microelectronic Manufacturing IV: 23-24 February 2006, San Jose, California, USA. SPIE, 2006.