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Fundamentals of semiconductor manufacturing and process control /

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Bibliographic Details
Main Author: May, Gary S.
Other Authors: Spanos, Costas J.
Format: Book
Language:English
Published: [Piscataway] : Hoboken, N.J. : IEEE ; Wiley-Interscience, [2006]
Subjects:
Semiconductors > Design and construction.
Integrated circuits > Design and construction.
Process control > Statistical methods.
Online Access:Table of contents
Description
Physical Description:xix, 463 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0471784060 (cloth : alk. paper)