Cover Image

Micro- and nanoelectronics 2005 : 3-7 October 2005, Zvenigorod, Russia /

Bibliographic Details
Corporate Authors: ICMNE-2005 Zvenigorod, Russia, Society of Photo-optical Instrumentation Engineers, Society of Photo-optical Instrumentation Engineers. Russian Chapter, Fiziko-tekhnologicheskiĭ institut (Rossiĭskai͡a akademii͡a nauk), Russia (Federation). Ministerstvo nauki, vyssheĭ shkoly i tekhnicheskoĭ politiki
Other Authors: Valiev, Kamilʹ Akhmetovich, Orlikovskiĭ, A. A. (Aleksandr Aleksandrovich)
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Washington : SPIE, [2006]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 6260.
Subjects:
Microelectronics > Congresses.
Nanotechnology > Congresses.
Lithography > Congresses.
Photonics > Materials > Congresses.
Description
Item Description:"This proceedings volume contains selected papers from those presented at the International Conference on Micro- and Nanoelectronics 2005 (ICMNE-2005)"--p. xv.
Physical Description:1 volume (various pagings) : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819463256