Micro-nanofabrication : technologies and applications /
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Beijing : Berlin :
Higher Education Press ; Springer,
2005.
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| Subjects: |
| Physical Description: | x, 304 pages : many illustrations ; 25 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 7040176637 (Higher Education Press : hd.bd.) 3540289224 (Springer : hd.bd.) |