Principles of physical vapor deposition of thin films /
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Amsterdam ; Boston ; London :
Elsevier,
2006.
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| Edition: | 1st ed. |
| Subjects: |
| Physical Description: | xi, 1160 pages : illustrations ; 25 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 008044699X (hbk.) |