Micro process engineering : fundamentals, devices, fabrication, and applications /

Bibliographic Details
Other Authors:	Kockmann, Norbert
Format:	Book
Language:	English
Published:	Weinheim : Wiley-VCH ; [2006]
Series:	Advanced micro & nanosystems ; v. 5.
Subjects:	Production engineering. Microtechnology.

Published 2006

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