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Micro process engineering : fundamentals, devices, fabrication, and applications /

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Bibliographic Details
Other Authors: Kockmann, Norbert
Format: Book
Language:English
Published: Weinheim : Wiley-VCH ; [2006]
Series:Advanced micro & nanosystems ; v. 5.
Subjects:
Production engineering.
Microtechnology.
Description
Physical Description:xxii, 507 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:3527312463 (hbk.)