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Materials science in microelectronics /

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Bibliographic Details
Main Author: Machlin, E. S.
Format: Book
Language:English
Published: Amsterdam ; London : Elseveir, 2005-2006.
Edition:2nd ed.
Subjects:
Thin films.
Microelectronics.
Description
Item Description:Previous edition: volume 1. 1995, volume 2. 1998.
Physical Description:2 volumes : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:008044640X (v. 1)
0080446396 (v. 2)