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Field guide to optical lithography /

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Bibliographic Details
Main Author: Mack, Chris A.
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE Press, [2006]
Series:SPIE field guides ; FG06.
Subjects:
Integrated circuits > Design and construction.
Microlithography.
Online Access:Table of contents
Description
Physical Description:xii, 122 pages : illustrations ; 21 cm.
Bibliography:Includes bibliographical references and index.