Nanostructure integration techniques for manufacturable devices, circuits, and systems : interfaces, interconnects, and nanosystems : 23-25 October 2005, Boston, Massachusetts, USA /
| Corporate Author: | Society of Photo-optical Instrumentation Engineers |
|---|---|
| Other Authors: | Freund, Minoru M., Islam, M. Saif, Dutta, Achyut K. |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
[2005]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 6003. |
| Subjects: |
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