Nanostructure integration techniques for manufacturable devices, circuits, and systems : interfaces, interconnects, and nanosystems : 23-25 October 2005, Boston, Massachusetts, USA /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Freund, Minoru M., Islam, M. Saif, Dutta, Achyut K.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2005]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 6003.
Subjects:
Description
Physical Description:1 volume (various pagings) : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819460273