APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Freund, M. M., Islam, M. S., & Dutta, A. K. (2005). Nanostructure integration techniques for manufacturable devices, circuits, and systems: Interfaces, interconnects, and nanosystems : 23-25 October 2005, Boston, Massachusetts, USA. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Minoru M. Freund, M. Saif Islam, and Achyut K. Dutta. Nanostructure Integration Techniques for Manufacturable Devices, Circuits, and Systems: Interfaces, Interconnects, and Nanosystems : 23-25 October 2005, Boston, Massachusetts, USA. Bellingham, Washington: SPIE, 2005.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Nanostructure Integration Techniques for Manufacturable Devices, Circuits, and Systems: Interfaces, Interconnects, and Nanosystems : 23-25 October 2005, Boston, Massachusetts, USA. SPIE, 2005.