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25th Annual BACUS Symposium on Photomask Technology : 4-7 October 2006, Monterey, California, USA /

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Bibliographic Details
Corporate Authors: Symposium on Photomask Technology Monterey, Calif., BACUS (Technical group), Society of Photo-optical Instrumentation Engineers
Other Authors: Weed, J. Tracy, Martin, Patrick M.
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Wash. : SPIE, [2005]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5992.
Subjects:
Integrated circuits > Masks > Congresses.
Microlithography > Congresses.
Description
Item Description:Some earlier conferences have title: Symposium on Photomask Technology and Management.
Physical Description:2 volumes (various pagings) : illustrations (some color) ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819460141