APA (7th ed.) Citation

Symposium on Photomask Technology Monterey, Calif, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers, Weed, J. T., & Martin, P. M. (2005). 25th Annual BACUS Symposium on Photomask Technology: 4-7 October 2006, Monterey, California, USA. SPIE.

Chicago Style (17th ed.) Citation

Symposium on Photomask Technology Monterey, Calif, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers, J. Tracy Weed, and Patrick M. Martin. 25th Annual BACUS Symposium on Photomask Technology: 4-7 October 2006, Monterey, California, USA. Bellingham, Wash.: SPIE, 2005.

MLA (9th ed.) Citation

Symposium on Photomask Technology Monterey, Calif, et al. 25th Annual BACUS Symposium on Photomask Technology: 4-7 October 2006, Monterey, California, USA. SPIE, 2005.

Warning: These citations may not always be 100% accurate.