Cover Image

Post-processing techniques for integrated MEMS /

Bibliographic Details
Main Author: Sedky, Sherif
Format: Book
Language:English
Published: Boston : Artech House, [2006]
Series:Microelectromechanical systems series.
Subjects:
Microelectromechanical systems.
Description
Physical Description:xiv, 207 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:1580539017 (alk. paper)