Micromanufacturing and nanotechnology /
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin ; New York :
Springer,
[2006]
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| Subjects: |
| Physical Description: | xxiii, 468 pages : illustrations ; 25 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 3540253777 (hd.bd.) |