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Mechanical design of microresonators : modeling and applications /

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Bibliographic Details
Main Author: Lobontiu, Nicolae
Format: Book
Language:English
Published: New York : McGraw-Hill, [2006]
Series:McGraw-Hill nanoscience and technology series.
Subjects:
Microelectromechanical systems > Design and construction.
Electric resonators > Design and construction.
Vibrators > Design and construction.
Detectors > Design and construction.
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