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Mechanical design of microresonators : modeling and applications /

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Bibliographic Details
Main Author:	Lobontiu, Nicolae
Format:	Book
Language:	English
Published:	New York : McGraw-Hill, [2006]
Series:	McGraw-Hill nanoscience and technology series.
Subjects:	Microelectromechanical systems > Design and construction. Electric resonators > Design and construction. Vibrators > Design and construction. Detectors > Design and construction.

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