Cover Image

Foundations of MEMS /

Bibliographic Details
Main Author: Liu, Chang, Ph.D
Format: Book
Language:English
Published: Upper Saddle River, NJ : Pearson Prentice Hall, [2006]
Subjects:
Microelectromechanical systems.
Description
Physical Description:xxii, 530 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0131472860
9780131472860
013199204X (pbk.)
9780131992047 (pbk.)