rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Design and control of a 6-Degree-of-Freedom levitated positioner with high precision
  name:
    name part: Hu, Tiejun, 1977-
    role:
      role term: creator
  name:
    name part: Kim, Wŏn-jong
    role:
      role term: thesis advisor.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: txu
    date issued: 2005
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: electronic
    form: remote
  abstract: This dissertation presents a high-precision positioner with a novel superimposed concentrated-field permanent-magnet matrix. This extended-range multi-axis positioner can generate all 6-DOF (degree-of-freedom) motions with only a single moving part. It is actuated by three planar levitation motors, which are attached on the bottom of the moving part. Three aerostatic bearings are used to provide the suspension force against the gravity for the system.The dynamic model of the system is developed and analyzed. And several control techniques including SISO (single input and single output) and MIMO (multi inputs and multi outputs)controls are discussed in the dissertation. The positioner demonstrates a position resolution of 20 nm and position noise of 10 nm rms in x and y and 15 nm rms in z. The angular resolution around the x-, y-, and z-axes is in sub-microradian order. The planar travel range is 160 mm x 160 mm, and the maximum velocity achieved is 0.5 m/s at a 5-m/s² acceleration, which can enhance the throughput in precision manufacturing. Various experimental results are presented in this dissertation to demonstrate the positioner's capability of accurately tracking any planar trajectories. Those experimental results verified the potential utility of this 6-DOF high-precision positioner in precision manufacturing and factory automation.
  note: by Tiejun Hu.
  note: "Major Subject: Mechanical Engineering"
  note: Title from author supplied metadata (automated record created on Sep. 21, 2005.)
  note: Vita.
  note: Abstract.
  note: Electronic resource.
  note: Mode of access: World Wide Web.
  note: System requirements: World Wide Web access and Adobe Acrobat Reader.
  note: Ph. D. Texas A&M University 2005.
  note: Includes bibliographical references.
  note: Text (Dissertation).
  subject:
    topic: Major mechanical engineering
  subject:
    topic: permanent magnet synchronous planar motor
  subject:
    topic: high precision motion control
  subject:
    topic: nano-positioning
  identifier: http://hdl.handle.net/1969.1/2360
  record info:
    record content source: TXA
    record creation date: 051006
    record change date: 20151102133413.0
    record identifier: in00002076704