rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Electroceramic-based MEMS
    sub title: fabrication-technology and applications
  name:
    name part: Setter, N. (Nava)
    name part: 1949-
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: nyu
    date issued: 2005
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xii, 414 pages : illustrations ; 25 cm.
  note: edited by Nava Setter.
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectromechanical systems
  classification: TK7875 .E42 2005
  classification: 621.381
  related item:
    title info:
      title: Electronic materials: science & technology
  identifier: 0387233105
  identifier: 2004058924
  record info:
    record content source: DLC
    record creation date: 040910
    record change date: 20151102123402.0
    record identifier: in00002075290