Cover Image

Electroceramic-based MEMS : fabrication-technology and applications /

Show other versions (1)
Bibliographic Details
Other Authors: Setter, N. (Nava), 1949-
Format: Book
Language:English
Published: New York : Springer Science+Business Media, [2005]
Series:Electronic materials: science & technology.
Subjects:
Microelectromechanical systems.
Description
Physical Description:xii, 414 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0387233105