Cover Image

MEMS/MOEMS packaging : concepts, designs, metarials, and processes /

Bibliographic Details
Main Author: Gilleo, Ken
Format: Book
Language:English
Published: New York : McGraw-Hill, [2005]
Subjects:
Microelectronic packaging.
Microelectromechanical systems.
Optoelectronic devices.
Description
Physical Description:xiii, 220 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references (pages 203-213) and index.
ISBN:0071455566