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Analysis and design principles of MEMS devices /

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Bibliographic Details
Main Author: Bao, Min-Hang
Format: Book
Language:English
Published: Amsterdam ; San Diego, CA : Elsevier, 2005.
Subjects:
Microelectromechanical systems.
Description
Physical Description:xii, 312 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0444516166 (hbk.)