Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range /
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| Other Authors: | , |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Weinheim :
Wiley-VCH,
[2005]
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| Subjects: |
| Item Description: | "Here, peer-reviewed papers are presented with contributions to the NanoScale 2004 seminar at the Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany, in March 2004"--P. [4] of cover. |
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| Physical Description: | xxii, 519 pages : illustrations ; 25 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 352740502X (cased) |