rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Optical microlithography XVIII
    sub title: 1-4 March 2005, San Jose, California, USA
  title info:
    title: Optical microlithography eighteen
  title info:
    title: Optical microlithography 18
  name:
    name part: Smith, Bruce W.
    name part: 1959-
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  name:
    name part: International SEMATECH
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 2005
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: 3 volumes (xlix, 1824 pages) : illustrations (some color) ; 28 cm.
  note: Bruce W. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH.
  note: Includes bibliographical references and index.
  subject:
    topic: Integrated circuits
    topic: Masks
    genre: Congresses
  subject:
    topic: Microlithography
    genre: Congresses
  subject:
    topic: X-ray lithography
    genre: Congresses
  subject:
    topic: Manufacturing processes
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 5754
  identifier: 0819457345 (3 v. set)
  record info:
    record content source: LHL
    record creation date: 050527
    record change date: 20151102050908.0
    record identifier: in00002060246