Photon processing in microelectronics and photonics IV : 24-27 January 2005, San Jose, California, USA /
| Corporate Authors: | , |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
[2005]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 5713. |
| Subjects: |
| Item Description: | "Conference on Laser applications in microelectronic and optoelectronic manufacturing X cosponsored by AFOSR--Air Force Office of Scientific Research (USA)". |
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| Physical Description: | xiv, 632 pages : illustrations (some color) ; 28 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 081945687X |