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Mechanics of microelectromechanical systems /

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Bibliographic Details
Main Author: Lobontiu, Nicolae
Other Authors: Garcia, E. (Ephrahim)
Format: Book
Language:English
Published: New York : Kluwer Academic Publishers, [2005]
Subjects:
Microelectromechanical systems.
Description
Physical Description:xi, 405 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:1402080131
0387230378 (e-book)