Introduction to focused ion beams : instrumentation, theory, techniques, and practice /
| Other Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York :
Springer,
[2005]
|
| Subjects: |
| Physical Description: | xiv, 357 pages : illustrations ; 25 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0387231161 (acid-free paper) 038723313X (e-book) |