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Principles of plasma discharges and materials processing /

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Bibliographic Details
Main Author: Lieberman, M. A. (Michael A.)
Other Authors: Lichtenberg, Allan J.
Format: Book
Language:English
Published: Hoboken, N.J. : Wiley-Interscience, [2005]
Edition:2nd ed.
Subjects:
Plasma dynamics.
Thin films > Surfaces.
Plasma etching.
Plasma chemistry > Industrial applications.
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by Lieberman, M. A. (Michael A.)
Published 1994
Book
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